JPH01124655U - - Google Patents
Info
- Publication number
- JPH01124655U JPH01124655U JP2013288U JP2013288U JPH01124655U JP H01124655 U JPH01124655 U JP H01124655U JP 2013288 U JP2013288 U JP 2013288U JP 2013288 U JP2013288 U JP 2013288U JP H01124655 U JPH01124655 U JP H01124655U
- Authority
- JP
- Japan
- Prior art keywords
- target
- ion
- ion implantation
- ion beam
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013288U JPH01124655U (en]) | 1988-02-17 | 1988-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013288U JPH01124655U (en]) | 1988-02-17 | 1988-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01124655U true JPH01124655U (en]) | 1989-08-24 |
Family
ID=31236244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013288U Pending JPH01124655U (en]) | 1988-02-17 | 1988-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01124655U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000026950A1 (fr) * | 1998-10-30 | 2000-05-11 | Applied Materials Inc. | Procede et dispositif pour l'implantation ionique |
-
1988
- 1988-02-17 JP JP2013288U patent/JPH01124655U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000026950A1 (fr) * | 1998-10-30 | 2000-05-11 | Applied Materials Inc. | Procede et dispositif pour l'implantation ionique |
| US6617594B1 (en) | 1998-10-30 | 2003-09-09 | Applied Materials, Inc. | Method and device for ion implanting |